• K8凯发国际

    Horizontal PECVD (Two-In-One)

    PRODUCTS AND SERVICES > Horizontal Furnaces Series > Horizontal PECVD (Two-In-One)

    Horizontal PECVD (Two-In-One)

    AlOx+SiN deposition.

    Equipment Name:

    Horizontal PECVD (Two-In-One)

    Equipment Model:

    PD-520/PD-520L/PD-520MAX

    Equipment Application:

    AlOx+SiN deposition.


    Features:


    1、The AIOx & SiN layers can be coated in the same furnace tube which helps in reducing the process steps,improving the yield and lowering the breakage rate effectively.  

    2、Optimal throughout solution: two-in-one configuration. 


    Parameters: